The JEOL JSM-6510LV low vacuum scanning electron microscope (SEM) is a high-performance SEM for fast characterization and imaging of fine structures (high resolution of 3.0 nm at 30 kV). It enables observation of specimens up to 150 mm in diameter.
The selectable “low vacuum” mode allows for observation of specimens that cannot be viewed at high vacuum due to excessive water content (like many biological samples) or because they have a non-conductive surface.
In addition to routine imaging at hundred time greater resolution than optical microscopes, and with a focal depth over ten times greater, the SEM allows for detailed measurements, including 3D measurements from stereo images. Dual live image display of the secondary electron image and a backscattered composition image allow the user to contrast and compare specific details.

Other highlights
  • Mechanically eucentric stage
  • Fast, unattended data acquisition (with stage automation)
  • Smart settings for common samples (create/store/recall)
  • Streamlined design
  • Compact footprint
  • Enhanced SE imaging
  • Superior low kV imaging
  • Multiple live image display (including picture in picture)
  • Signal mixing
  • Live, full screen image
  • Video capability (.avi files)



    • High vacuum mode: 3.0 nm (30 kV)
    • Low vacuum mode: 4.0 nm (30 kV)

Accelerating voltage: 0.5 to 30 kV

Magnification: 5x to 300,000x (printed as a 128 mm x 96 mm micrograph)
Objective lens apertures: Three position, controllable in X⁄Y directions
Maximum specimen size: 125 mm ∅ full coverage (152.4 mm ∅ loadable)
Specimen stage: Eucentric goniometer

    • X = 80 mm, Y = 40 mm, Z = 5-48 mm
    • R = 360° (endless)
    • Tilt -10⁄+90°
    • Option: computer controlled 2, 3 or 5 axis motor drive