Picture of the ultra-clean class-1000 clean-room area

Wafer handling

OLYMPUS DSX110 microscope

Probe System Cascade Microtech CM300; up to 12 inches wafers, 14 nm technology node

A wafer of the ams-h350 H35DEMO chip for the ATLAS experiment probed in the Cascade Microtech station

The first prototype (1.5x1.0 mm2) of the IHP chip for the TT-PET project probed in the Cascade Microtech station

The first prototype (1.5x1.0mm2) of the IHP chip for the TT-PET project probed in the Cascade Microtech station

Plasma cleaning system

Plasma cleaning system

SET Accµra100 flip-chip machine

SET Accµra100 flip-chip machine glue dispenser

Mitutoyo metrology system (1600 x 900 x 600): mechanical + optical probes

Wire bonding machine Hess&Knipps B810

Pull tester Royce 650

Wire bonded ams-ah18 ATLASPix1 monolithic chip for the ATLAS experiment